Browsing by Author "Cook, E. H."

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    • Energy Conservation in the Clean Environment: A Design for All Seasons 
      Cook, E. H. (Energy Systems Laboratory (http://esl.tamu.edu); Texas A&M University (http://www.tamu.edu), 1984)
      Clean rooms for microelectronic manufacturing are becoming increasingly complex. As the space between the lines on the mask of the silicon chip approaches one and one-half microns, the need for ultra clean and precision ...